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publicationDate 2020-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2020167235-A
titleOfInvention Semiconductor device
abstract PROBLEM TO BE SOLVED: To realize a highly reliable semiconductor device. A semiconductor device includes an oxide semiconductor layer containing indium, a gate electrode facing the oxide semiconductor layer, a gate insulating layer between the oxide semiconductor layer and the gate electrode, and the oxide. It has a first electrode in contact with the oxide semiconductor layer from above the semiconductor layer. Indium is unevenly distributed in the oxide semiconductor layer in the region overlapping the first electrode in a plan view. The gate electrode and the gate insulating layer may be provided below the oxide semiconductor layer. [Selection diagram] Fig. 1
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