http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020124778-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-12 |
| filingDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7df134a7ab4d738b5393bb25a64a934 |
| publicationDate | 2020-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020124778-A |
| titleOfInvention | Processing equipment |
| abstract | PROBLEM TO BE SOLVED: To provide a processing device capable of accurately detecting the position of a processing means in the axial direction of a spindle. SOLUTION: A dicing apparatus 10 which is an example of a processing apparatus of the present invention cools a thermal expansion member 56 connecting a detector 54 to a Y table 40 and a spindle 48 and a thermal expansion member 56 with the same cooling liquid. And a cooling system 60. The left end 56B of the thermal expansion member 56 is fixed to the Y table 40, the detector 54 is fixed to the right end 56A, and the thermal expansion member 56 is configured to be thermally expandable in the moving direction of the spindle motor 46 with the left end 56B as the first reference position. .. [Selection diagram] Fig. 4 |
| priorityDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.