| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a3bb4ae410da4be8184239adc5ab1c0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate |
2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29c9d092bce9944a72cdb9f313d37499
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9399fdf1eb4ff57189ed6143362cf0df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63fb8ebe2fa752f32cf0dfa447040eea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fdd6cf272dc5a09051c1550974f7089 |
| publicationDate |
2020-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2020114940-A |
| titleOfInvention |
Method for forming a transition metal-containing film on a substrate by a cyclic deposition process |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for forming a transition metal-containing film on a substrate by a cyclic deposition process, particularly a method for forming a cobalt- or nickel-containing film. SOLUTION: The substrate is contacted with a first gas phase reactant containing a transition metal halide compound containing a bidentate nitrogen-containing addition ligand, and the substrate is supplied with a second gas containing a reducing agent precursor. Contacting with a phase reactive material to form a transition metal-containing film having a film thickness of less than 50 nanometers and an electrical resistivity of less than 50 μΩ-cm. [Selection diagram] Figure 1 |
| priorityDate |
2019-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |