http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020112813-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
filingDate 2020-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32af96b4ad7c28c35e5ed9da36901ffa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60ceb97ffa8c2ffcb34d3c17b95dc3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80acf29d41c626f58bbf03ec09fe213a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2188cce85f627e039f1fa290a99022d8
publicationDate 2020-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2020112813-A
titleOfInvention Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition
abstract PROBLEM TO BE SOLVED: To provide a pattern forming method which is less likely to cause variation in thickness between production lots and can be suitably applied to gray scale exposure, and an actinic ray-sensitive or radiation-sensitive resin composition. A step A of forming a film having a thickness T on a substrate using an actinic ray-sensitive or radiation-sensitive resin composition containing a resin whose solubility in a developing solution is changed by the action of an acid and an acid generator. And a step B of exposing the film, and a step C of developing the exposed film with a developing solution to form a pattern, wherein the film formed in the step A is A pattern forming method satisfying at least one of the following Condition 1 and Condition 2. Condition 1: When the film thickness T is 800 nm or more, the value of γ is less than 10,000. Condition 2: When the film thickness T is less than 800 nm, the value of γ is less than 5000. [Selection diagram] Figure 2
priorityDate 2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004310121-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419487501
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8302
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23207359
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20083
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID45658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456466732
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426168337
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421062847
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66854
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449676919
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420320341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3023
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20586
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458395508
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453054575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13998878
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393652
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID537309
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420257518
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419510528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457465597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15417
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420317239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415801673
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3680404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID524190
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453703788
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647357
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450114497
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7351
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10994503
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID134921
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527088
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393629
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457830920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID638097
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448786743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222528
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456001950
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13235
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419539361
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424603591
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9794626
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87534372
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519450
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431746675
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12178
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419573199
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458396233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455786663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457342965
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456357899
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11529
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6999002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416000355
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420120093
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21921992
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9238
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450647129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414877336
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23190049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419477666
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21951565
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414011662
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9903
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450411023
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421164088
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID121686
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520307
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450418934
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14257
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426127296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408470213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421322735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449892084
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7298
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538106
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22386
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457203572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID236409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14325059
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11520
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456371369
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10976
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97812
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513864
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425106687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21226428
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422135252
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456373471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419549337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453649127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14390089
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11008049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13529
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410439394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414034094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426126020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451105532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419540783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID517422
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451110572
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10038
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456148107
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9233
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448389239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8129
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6992806
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID221493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419562219
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22646129
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420348536
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415893423
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409566743

Total number of triples: 203.