| abstract |
PROBLEM TO BE SOLVED: To provide an active gas irradiation device capable of further enhancing the effect of plasma. SOLUTION: A plasma generating part 12, a cowling 2 covering the plasma generating part 12, an irradiation tube 1c having an irradiation port 1a protruding from a tip of the cowling 2 and discharging an active gas activated by plasma, The plasma generating part 12 is provided with an instrument 10 including a tubular dielectric 3 having a gas flow passage 6 therein, and a plasma generating part 12 provided inside the tubular dielectric 3. An internal electrode 4 that extends in the tube axis direction and is separated from the tubular dielectric body 3, and an external electrode 5 that is provided outside the tubular dielectric body 3 and that faces the internal electrode 4 via the tubular dielectric body 3. The gas flow path 6 extends in the tube axis direction of the tubular dielectric 3, the irradiation tube 1c communicates with the gas flow path 6, and the tube axis of the irradiation tube 1c is relative to the tube axis of the tubular dielectric 3. Is bent. [Selection diagram] Figure 2 |