http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020075839-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f3050725ae5e8b6e7f2c4fd4deaed0a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D5-04 |
| filingDate | 2018-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6351273e20929e9b6ed7731d3e0ca9e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a0acfa55bbfdaaa68963e216a35ade http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1be28008930b6e35e58f5a5dd840bc43 |
| publicationDate | 2020-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020075839-A |
| titleOfInvention | SiC substrate for growth of gallium nitride compound semiconductor |
| abstract | PROBLEM TO BE SOLVED: To provide a SiC substrate used for growth of a gallium nitride based compound semiconductor, which has a high processing speed in chemical polishing and is suitable for productivity and process stability. SOLUTION: In a SiC substrate for growing a gallium nitride compound semiconductor for an electronic device, the epitaxyal growth surface of the substrate is set to a surface whose off angle is limited with respect to the Silicon surface of the C surface. It is characterized by improving the processing speed of SiC substrates for gallium nitride based compound semiconductors used in devices and electronic devices, and at the same time improving the flatness of the epitaxially grown gallium nitride based compound semiconductor surface and expanding the terrace length. .. [Selection diagram] Fig. 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022215670-A1 |
| priorityDate | 2018-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.