http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020041833-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd0c923c602559876c9c14552987f9d8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2018-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd3d4f947542ccdef7eac793563be534 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0f593b47e8fe2da39c3dfc133899e2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f996292721f45319200d33a3fd0b25e |
| publicationDate | 2020-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020041833-A |
| titleOfInvention | Gas detector |
| abstract | After dehumidifying a sample gas by a dehumidification cell, the sample gas is supplied to a MEMS gas sensor, and a detection target gas in the sample gas is adsorbed to a metal oxide semiconductor of the MEMS gas sensor which is not heated. Next, the metal oxide semiconductor is heated by the heater control section, and the gas to be detected is detected by the gas detection section from the output of the MEMS gas sensor at the time of heating. [Effect] A detection target gas having a sub ppb concentration can be detected. [Selection] Fig. 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023067955-A1 |
| priorityDate | 2018-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.