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filingDate 2018-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_053c9e136f4d0b0c73c1d0145fc95e3e
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publicationDate 2020-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2020030232-A
titleOfInvention Manufacturing method and optical device for micro-hole optical element
abstract An object of the present invention is to provide a method for easily producing LEO with stable quality. According to one aspect of the method for manufacturing a micro-hole optical element, a plurality of holes (3) are drilled side by side in a substrate (2), and an extension line in the depth direction of each hole (3) moves to a common intersection point located outside the substrate. A method of manufacturing a micro-hole optical element in which each hole 3 intersects a common spherical surface centered on the intersection, wherein a plurality of holes 3 are formed in the substrate 2, and a plurality of holes 3 are formed. Forming a reflective layer 4 on each inner wall. [Selection diagram] FIG.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7196718-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020160210-A
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