http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020004965-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f548962093d468be111a5afcea9d1c3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2019-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f51059fc071dec57492a1fcf71d6bf0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_402b1da3767540f20579b9d9efbeea77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f8f63535db98240091a1b00a3220441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab5c278d0e1a38381508d8787f3f0223 |
| publicationDate | 2020-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020004965-A |
| titleOfInvention | Silicon substrate etching solution |
| abstract | An object of the present invention is to provide a silicon substrate etching solution that can increase the selectivity of a silicon oxide film to a silicon nitride film by using a silicon additive. Another object of the present invention is to provide a silicon substrate etching solution that can prevent the silicon additive from being decomposed and discolored at a high temperature by using a silicon additive having high safety at high temperatures. Kind Code: A1 Abstract: A silicon additive containing phosphoric acid and at least one of compounds represented by a first chemical formula (Chemical Formula 1) and a second chemical formula (Chemical Formula 2). A silicon substrate etching solution including an agent is provided. [Selection diagram] None |
| priorityDate | 2018-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID467673775 |
Total number of triples: 17.