| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2009-155 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 |
| filingDate |
2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019527834-A |
| titleOfInvention |
Elastic resonance device with functionalized material controlled |
| abstract |
A microelectromechanical system (MEMS) resonator includes at least one functionalized material that is disposed at least above the center of the upper electrode, but not entirely. The functionalized material on at least a portion of the periphery of the active area of the resonator is omitted, and the active area that exhibits the highest sensitivity at the center point and the lower sensitivity at the periphery is the area of the analyte in the least sensitive area. Prevent binding. The at least one functionalized material has a maximum length in the range of about 20% to about 95% of the active region length and a maximum width in the range of about 50% to about 100% of the active region width. Further provided is a method of manufacturing a MEMS resonant device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021172588-A1 |
| priorityDate |
2016-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |