http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019505960-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-061 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-186 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08 |
| filingDate | 2017-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019505960-A |
| titleOfInvention | Improved ion source cathode shield |
| abstract | The ion source includes an arc chamber having an arc chamber body. The electrode extends into the interior region of the arc chamber body. The cathode shield is cylindrical and has an axial hole. The axial hole is configured to pass the axial hole through the electrode. The first end and the second end of the main body each have a first gas conductance limiter and a second gas conductance limiter. The first gas conductance limiter extends from the outer diameter of the main body and has a U-shaped lip. The second gas conductance limiter has a recess for the seal in order to protect the seal from corrosive gas and maintain the soundness of the seal. The gas source introduces gas into the arc chamber body. The liner has an opening. The opening is configured to allow the cathode shield to pass through the opening. The liner has a recess. |
| priorityDate | 2016-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.