http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019216202-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54063f3bf0907634a129e16c897d1717 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-12 |
| filingDate | 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcc5708c0c64a819e5cb4947b8d05ac4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e53d4e617205fb4928248c86c58a47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b9085909998e8be2edc93db88cacfe1 |
| publicationDate | 2019-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019216202-A |
| titleOfInvention | Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor inspection device |
| abstract | In a silicon carbide semiconductor device including a MOSFET having a source region on an upper surface of a substrate and a drain region on a rear surface of the substrate, a time required for a test for determining the presence or absence of a crystal defect as a threading dislocation is reduced. Reduce the manufacturing cost of silicon semiconductor devices. Kind Code: A1 A negative voltage is applied between a gate and a source from a negative voltage applying unit, and a positive voltage of 1 kV or more and a rated voltage or less is applied between a drain and a source from a positive voltage applying unit. , The gate current and the drain current are measured using the ammeters 45 and 46. [Selection] Figure 15 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022202076-A1 |
| priorityDate | 2018-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.