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publicationDate 2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019212857-A
titleOfInvention Semiconductor device and manufacturing method thereof
abstract In a semiconductor device having a plurality of memory regions each composed of a split gate type MONOS memory, a threshold voltage of a memory cell is set to a different value for each memory region. A metal film that is a work function film constituting a memory gate electrode of a memory cell in a data area and a metal film that is a work function film constituting a memory gate electrode of a memory cell in a code area are mutually connected. By forming with different materials or with different thicknesses, memory cells having different threshold voltages are formed. [Selection] Figure 4
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