http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019200433-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N1-113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-10 |
| filingDate | 2019-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea66f638c7bcf4bd769f44650f60a34a |
| publicationDate | 2019-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019200433-A |
| titleOfInvention | Pattern drawing method |
| abstract | A pattern drawn by each of drawing lines defined by one-dimensional scanning on a plurality of scanning units that perform one-dimensional scanning in the main scanning direction on a substrate with spot light beams from a light source device is formed on the substrate. A pattern drawing method using a pattern drawing apparatus that is arranged so as to be continued in the main scanning direction and relatively moves a plurality of scanning units and a substrate in a sub-scanning direction intersecting with the main scanning direction is selected from the plurality of scanning units. Selecting a specific scanning unit corresponding to the width of the substrate in the main scanning direction, the width of the exposure region on the substrate in which the pattern is drawn in the main scanning direction, or the position of the exposure region on the substrate in the main scanning direction. And drawing data corresponding to the pattern to be drawn in each of the specific scanning units via the beam delivery unit that delivers the beam from the light source device to the scanning unit. The Zui and intensity modulated drawn beam, including, and supplying alternatively sequentially to each of the particular scan unit. [Selection] Figure 24 |
| priorityDate | 2019-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.