http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019197775-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7820eb060b017f856ba2ce4646fb12c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2018-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fdf020b55460b489c690e005a60dbf8 |
| publicationDate | 2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019197775-A |
| titleOfInvention | Auxiliary method and auxiliary device |
| abstract | An alignment assisting method and an assisting device for accurately aligning a rotation axis and a photographing optical axis are provided. A table for holding a workpiece that rotates about a rotation axis and a photographing unit disposed at a position facing a workpiece holding surface of the table are moved relative to each other in a direction perpendicular to the rotation axis. In the auxiliary method for assisting the alignment operation for aligning the rotation axis of the imaging unit and the imaging optical axis of the imaging unit, an imaging control step for executing moving image shooting of the workpiece holding surface by the imaging unit, and the work holding obtained by the imaging unit A display step of displaying a moving image of the surface on the display unit, and a first index arranged along one or a plurality of circumferences centered on the photographing optical axis with respect to the moving image displayed on the display unit A display control step for superimposing display, and a rotation step for continuously rotating the table around the rotation axis in accordance with moving image shooting by the shooting unit. [Selection] Figure 6 |
| priorityDate | 2018-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 |
Total number of triples: 12.