| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3310ea86f3c492f6c09d7be6592866d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 |
| filingDate |
2018-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3116ffdcca579ccbfcd38acd61a32605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bd45f7863a3e2c7e26d5ff9de905eb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da9cc678b097e1afdfe2cbe659c234fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c3e779e1a94d8917d1a86d7aed63b58 |
| publicationDate |
2019-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019193168-A |
| titleOfInvention |
Bulk acoustic resonator and manufacturing method thereof |
| abstract |
A bulk acoustic resonator capable of improving resonance characteristics and a method of manufacturing the same are provided. A bulk acoustic resonator comprising: a substrate having a substrate protective layer formed on an upper surface; a membrane layer that forms a cavity together with the substrate; and a resonance part formed on the membrane layer. A bulk acoustic resonator is disclosed in which the membrane layer includes a first layer and a second layer made of the same material as the first layer and having a higher density than the first layer. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022123816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113839638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113824420-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113839637-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114759897-A |
| priorityDate |
2018-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |