| abstract |
A diaphragm technology for microvalves, micropumps, and other pneumatic fluid components for use in a microassay device, and methods of making the same. A microvalve formed by a microcavity, divided by a diaphragm web into a first semicavity bounded by a first inner wall and a second semicavity bounded by a second inner wall; A microfluidic circuit element, such as a micropump or microvent, wherein the diaphragm web has a first state in contact with a first inner wall and a second state in contact with a second inner wall; Characterized as a thin film that does not exhibit essentially any elasticity when moving between the first state and the second state, the thin film web is stretched beyond its yield point before or during use. Are microfluidic circuit elements. [Selection diagram] FIG. |