| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a37d7a7385924dd55e29ac1e96d1492 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3286 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate |
2019-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43fbe5d8e6957f146163dd16a98c0d6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eeb654412115449e44135348731a838 |
| publicationDate |
2019-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019189517-A |
| titleOfInvention |
Oxide sintered body, sputtering target, and method for producing oxide thin film |
| abstract |
A sputtering target capable of stably performing sputtering and an oxide sintered body for producing the sputtering target are provided. An oxide sintered body according to one embodiment of the present invention is an oxide sintered body containing indium, gallium, and zinc at a ratio satisfying the following formulas (1) to (3): The crystal phase is composed of a crystal phase, and the average grain size of the crystal phase is 15.0 μm or less. 0.01 ≦ In / (In + Ga + Zn) <0.20 (1) 0.10 ≦ Ga / (In + Ga + Zn) ≦ 0.49 (2) 0.50 ≦ Zn / (In + Ga + Zn) ≦ 0.89 (3) [Selection] Figure 4 |
| priorityDate |
2018-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |