http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019182717-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf334efdc57a817d413aef1d9f5e9d80 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9607 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-125 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-361 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-124 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2237-365 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-143 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C21-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B37-005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K20-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B37-04 |
| filingDate | 2018-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e736463712fcd6289e4211ea56eb3f6 |
| publicationDate | 2019-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019182717-A |
| titleOfInvention | Bonding method of optical components |
| abstract | When joining an optical component and a support component, the optical component and the support component of different materials are joined with a strong joining force in order to remove heat from the optical component, and heat removal is efficiently performed. To be able to. An optical component 10 made of quartz glass and a support component 15 made of ceramics are joined, a step of forming a metal layer 160 on the surface of the support component 15 by electroless plating, and the formed metal layer Is polished with a polishing pad 352 to form a first smooth surface 161a on the surface of the support component 15, a step of polishing the surface of the optical component 10 with a polishing pad 352 to form a second smooth surface 10a, and ultrasonic cleaning water. The first smooth surface 161a and the second smooth surface 10a are cleaned, and the first metal film 17 is formed on the first smooth surface 161a by vapor deposition in the vacuum chamber, and the second metal is deposited on the second smooth surface 10a by vapor deposition. A bonding method comprising: a step of forming a film 11; and a step of interatomic bonding by atomic diffusion between surfaces in which the first metal film 17 and the second metal film 11 are brought into contact with each other. [Selection] Figure 11 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2021210047-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7186921-B2 |
| priorityDate | 2018-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.