http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019177456-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccb2f721f6d2a7f79ce09d39998cea87 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G18-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b453e6b20be2a43d6ab27732ce601a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_030cafb5b3c286174c2ac43e72eddced http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b8e0681609f53b2dfacecd1524b4c52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0076f6f3cc603e05c49f8829613e2a02 |
| publicationDate | 2019-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019177456-A |
| titleOfInvention | Polishing pad, method for manufacturing polishing pad, and method for polishing surface of optical material or semiconductor material |
| abstract | An object of the present invention is to provide a polishing pad that has lower hardness than conventional polishing pads and generates less organic residues, and as a result, can suppress the occurrence of defects such as scratches and organic residues. A polishing pad having a polishing layer containing a polyurethane resin, The polyurethane resin is a cured product of a curable resin composition containing an isocyanate-terminated urethane prepolymer and a curing agent, and the curing agent is an amine system having a number average molecular weight represented by the following formula (I) of 400 to 1300. The polishing pad comprising a curing agent. (In the above formula (I), n is a natural number of 1 or more at which the amine-based curing agent has a number average molecular weight of 400 to 1300.) [Selection figure] None |
| priorityDate | 2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.