http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019173645-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8aa118fbfa85a6e0cc8c13a8afca19ab |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F15B15-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C27-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F04B43-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B43-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C27-10 |
| filingDate | 2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53829dcc97631746bbe0ab41b6c11e07 |
| publicationDate | 2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019173645-A |
| titleOfInvention | Diaphragm device manufacturing method and diaphragm device |
| abstract | When a glass diaphragm is bonded to a substrate, the airtightness of the bonded portion is improved. A manufacturing method of a diaphragm device includes a joining step of joining a base material and a diaphragm so as to seal a flow path. In the joining step, the sealing material 14 is irradiated with the laser light L in a state where the sealing material 14 is interposed between the base material 2 and the diaphragm 3. Thereby, the sealing layer 5 which joins the base material 2 and the diaphragm 3 is formed. [Selection] Figure 4 |
| priorityDate | 2018-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.