http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019173162-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-1403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-60 |
filingDate | 2019-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8e3403fb271fbc0a52b176288dfdf09 |
publicationDate | 2019-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2019173162-A |
titleOfInvention | Tin or tin alloy plating solution and bump forming method using the same |
abstract | Even with patterns having different bump diameters, it is possible to obtain a bump having a uniform bump height with little variation in height of large and small diameter bumps formed after reflow, and having no voids. A soluble salt (A) containing at least a stannous salt, an acid selected from an organic acid and an inorganic acid or a salt thereof (B), a surfactant (C), and benzalacetone (D) And a tin or tin alloy plating solution containing a solvent (E), the plating solution being used to form patterns with different bump diameters on the substrate, and benzalacetone (D) is contained in the plating solution. It is contained in an amount of 0.05 g / L to 0.2 g / L, the mass ratio (C / D) of the surfactant (C) to benzalacetone (D) is 10 to 200, and benzalacetone (D The mass ratio (E / D) of the solvent (E) to 10) is 10 or more. The surfactant (C) is preferably a nonionic surfactant obtained by condensation of polyoxyethylene (EO) and polyoxypropylene (PO). [Selection] Figure 1 |
priorityDate | 2018-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 207.