http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019165509-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate | 2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea7b8a3284626c3bd8cbd870849003d5 |
| publicationDate | 2019-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019165509-A |
| titleOfInvention | Method for manufacturing vibrator |
| abstract | A vibrator capable of processing a vibrating body and a driving unit with high accuracy using a semiconductor processing apparatus and having high driving efficiency is provided. The vibrator includes a silicon substrate, a first silicon oxide film disposed in a partial region of the silicon substrate, and a fixed portion made of silicon and supported by the first silicon oxide film, And a vibrating body having a vibrating arm portion separated from surrounding silicon other than the fixed portion by a groove, a second silicon oxide film disposed in a predetermined region of the vibrating body, and a polysilicon film, And a driving unit that covers the second silicon oxide film. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021215036-A1 |
| priorityDate | 2019-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.