http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019119791-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-3472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5419 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-3445 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-18 |
| filingDate | 2017-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8996369d0e2aaed86c4b125d072b129a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8afbed79829e45bcfa8c1150ec8bb029 |
| publicationDate | 2019-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019119791-A |
| titleOfInvention | Method for water repellency of substrate, surface treatment agent, and method for suppressing collapse of organic pattern or inorganic pattern when cleaning substrate surface with cleaning liquid |
| abstract | PROBLEM TO BE SOLVED: To provide a substrate water repellency method capable of providing a substrate excellent in water repellency, a surface treatment agent used therefor, and an organic pattern or inorganic pattern when cleaning the substrate surface with a cleaning liquid which can suppress pattern collapse. To provide a way to control The method includes exposing a surface treatment agent to a surface of a substrate, The surface treatment agent comprises a water repellent agent (A) and a nitrogen-containing heterocyclic compound (B), The water repellent method of the board | substrate in which the said water repellent agent (A) contains the alkoxy monosilane compound which has a hydrophobic group couple | bonded with a silicon atom. A water repellent agent (A) and a nitrogen-containing heterocyclic compound (B), The surface treatment agent whose said water repellent agent (A) contains the alkoxy monosilane compound which has a hydrophobic group couple | bonded with a silicon atom. 【Selection chart】 None |
| priorityDate | 2017-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 251.