| abstract |
A method of fabricating an efficient barrier and barrier between a metal interconnect and a glass seal. An article having a metal layer and a glass layer, and a method for preventing or reducing a chemical reaction between the metal layer and the glass layer are disclosed. The article has a barrier layer disposed between the metal layer and the glass layer. The barrier layer comprises alumina and phosphate. The phosphate includes aluminum dihydrogen phosphate, an aluminum-containing phosphate, a phosphate of an element of the metal layer, a phosphate of an element of a glass layer, or a combination thereof. The method comprises disposing a barrier layer between the metal layer and the glass layer. [Selected figure] Figure 1 |