http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019107857-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99a5fe0651a3ad2cbba5bb54849a1427 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2035-1041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2400-0487 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2035-1034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0829 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2202-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-0605 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-1065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-0268 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-00 |
| filingDate | 2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad0f88f20f15b5d24787daaefed92885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4527375b6e68cc7fa719365fb510fba9 |
| publicationDate | 2019-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019107857-A |
| titleOfInvention | Chemical solution discharge device and chemical solution dropping device |
| abstract | PROBLEM TO BE SOLVED: To provide a chemical solution discharge apparatus capable of discharging an aqueous solution in an embodiment. A chemical liquid discharge device according to an embodiment is a pressure chamber structure having a first surface and a second surface, and a pressure chamber provided inside, wherein the pressure chamber is provided from the second surface side. The pressure chamber has a supply port through which the chemical solution is supplied, and a discharge port through which the chemical solution is discharged from the first surface side, and at least a part of the material of the inner wall of the pressure chamber is silicon or silicon oxide The surface of the portion of the inner wall made of silicon or silicon oxide is detected by X-ray photoelectron spectroscopy as compared to the surface of a silicon wafer on which a natural oxide film not subjected to ultraviolet irradiation or oxygen plasma treatment is formed. The pressure chamber structure has a large ratio of the total area of the peaks of the monovalent, divalent and trivalent bonded silicon detected by X-ray photoelectron spectroscopy to the area of the tetravalent bonded silicon peak , The pressure chamber And an actuator for changing the internal pressure to discharge the chemical solution in the pressure chamber from a nozzle. [Selected figure] Figure 4 |
| priorityDate | 2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.