http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019101440-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_129e393582e6bdf4029baf2206522f45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 |
filingDate | 2018-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d29c65751f4c656134e39293847c110b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_375dae95ba516543a70f963a4b795d75 |
publicationDate | 2019-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2019101440-A |
titleOfInvention | Positive photosensitive resin composition, cured film, semiconductor device, and method of producing relief pattern of cured film |
abstract | The present invention provides a positive photosensitive resin composition having high durability even under severe conditions of low temperature and high temperature. A positive photosensitive resin composition has the following constitution. That is, one or more alkali-soluble resins selected from (A) polyimide, polybenzoxazole, polyimide precursor, polybenzoxazole precursor and a copolymer of two or more resins selected therefrom, and (B) A positive photosensitive resin composition comprising a polysiloxane having a carboxyl group and / or a phenolic hydroxyl group, (C) a photosensitizer and (D) a solvent, wherein 100 parts by weight of the (A) alkali-soluble resin is (B) A positive photosensitive resin composition comprising 1 to 100 parts by weight of a polysiloxane. 【Selection chart】 None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114539524-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021085072-A1 |
priorityDate | 2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 433.