abstract |
【Task】 The present invention provides a technology for mounting a semiconductor gas sensor device on a ceramic substrate that can withstand the high temperature environment. [Solution means] A sensor is formed by bonding a sensor device having a gas sensing function formed on a semiconductor substrate on a ceramic substrate, and the sensor device is metallized for connection made of Pt, and an insulating film of the sensor device and the metallized A stress buffer layer is formed between them, a heater is mounted on the ceramic substrate, and the sensor device is configured to be mounted on the ceramic substrate via a noble metal bump in an arrangement straddling the heater. . [Selected figure] Figure 3 |