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publicationDate 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2019091870-A
titleOfInvention Sensor
abstract 【Task】 The present invention provides a technology for mounting a semiconductor gas sensor device on a ceramic substrate that can withstand the high temperature environment. [Solution means] A sensor is formed by bonding a sensor device having a gas sensing function formed on a semiconductor substrate on a ceramic substrate, and the sensor device is metallized for connection made of Pt, and an insulating film of the sensor device and the metallized A stress buffer layer is formed between them, a heater is mounted on the ceramic substrate, and the sensor device is configured to be mounted on the ceramic substrate via a noble metal bump in an arrangement straddling the heater. . [Selected figure] Figure 3
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