http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019089670-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6988d9908404fcf44b715ec2daa9e579 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00 |
| filingDate | 2017-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_698e28f0435d718cf36515d3283d89dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78b8145f27406e064e257368940f25cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a924f586cab2abcffdc83d426c7e48a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0be0ebdc297f459b29f4fce2dfe3e0b |
| publicationDate | 2019-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019089670-A |
| titleOfInvention | Ceria-based composite fine particle dispersion, method for producing the same, and abrasive grain dispersion for polishing containing ceria-based composite fine particle dispersion |
| abstract | An object of the present invention is to provide a silica-based composite particle dispersion capable of polishing at high speed even with a silica film, a Si wafer, or a difficult-to-process material, and simultaneously achieving high surface accuracy. A ceria-based composite fine particle dispersion comprising ceria-based composite fine particles having the following characteristics and having a short diameter / long diameter ratio and an average particle diameter in a specific range. The ceria-based composite fine particle 20 has a mother particle 10, a cerium-containing silica layer 12 on the surface thereof, and child particles 14 dispersed inside the cerium-containing silica layer 12, and the mother particle 10 is mainly composed of amorphous silica. The child particles 14 contain crystalline ceria as the main component. The coefficient of variation in the particle size distribution of the secondary particles 14, the mass ratio of silica to ceria in the ceria-based composite fine particles, and the minor axis / major axis ratio of the mother particles 10 are within a specific range. The ceria-based composite fine particle 20 has an average crystallite diameter of 10 to 25 nm of crystalline ceria 14 measured by X-ray diffraction measurement. When the ceria-based composite fine particle 20 is subjected to X-ray diffraction, only the crystalline phase of ceria is detected Be done. [Selected figure] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7348098-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021241626-A1 |
| priorityDate | 2017-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 127.