| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2018-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b61abe184b6197353dc2702be63fab4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d847fb94c4c03a4512d1029e2930ac3b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c754dc205b7184c262587a215cd2b74d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cd8f21b5f09799dfd4f270b065717e3 |
| publicationDate |
2019-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019066829-A |
| titleOfInvention |
Radiation sensitive resin composition and use thereof |
| abstract |
The present invention provides a radiation sensitive resin composition capable of achieving both radiation sensitivity and so-called PCD and PED margin characteristics. A structural unit (I) containing an aromatic ring and an alkoxysilyl group directly bonded to the aromatic ring, and a structural unit (II) containing an acidic group (in the same or different polymers) Containing a polymer component (A) having a structural unit derived from unsaturated carboxylic acid and a hydroxy-fluorinated alkyl group-containing monomer), a radiation sensitive compound (B), and an organic solvent (G) The radiation sensitive resin composition characterized by the above. 【Selection chart】 None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7339809-B2 |
| priorityDate |
2017-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |