http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019061985-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf334efdc57a817d413aef1d9f5e9d80 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K26-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2017-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a1e002110c2829c634bb7a258582658 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39120aac3ea9325d55be69fb091a0496 |
| publicationDate | 2019-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019061985-A |
| titleOfInvention | Chip manufacturing method |
| abstract | The present invention provides a chip manufacturing method capable of manufacturing a plurality of chips by dividing a plate-like workpiece without using an expanded sheet. A chip is irradiated with a laser beam only along a line to be divided such that a focusing point of a laser beam of a wavelength having transparency to a gallium nitride substrate is positioned at a first depth, Positioning a focusing point of a laser beam of a wavelength having transparency to the gallium nitride substrate at a second depth position, forming a first modified layer along a planned division line of the region; A second laser processing step of irradiating the laser beam along the planned dividing line to form a second modified layer in which the end portion overlaps the extra peripheral region, and applying a force to the gallium nitride substrate to form a gallium nitride substrate A dividing step of dividing into individual chips, and in the dividing step, a force is applied by heating and cooling to divide the gallium nitride substrate into individual chips. [Selected figure] Figure 6 |
| priorityDate | 2017-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.