| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_800cb9ea13490b2be4ac36483ca026bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-553 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-1456
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D45-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate |
2017-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa14b7bbf372e60b9bc86aca63be8469 |
| publicationDate |
2019-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019057530-A |
| titleOfInvention |
Manufacturing equipment and exhaust gas treatment equipment |
| abstract |
The present invention provides a manufacturing apparatus capable of suppressing exhaust pipe blockage and exhaust pump failure. A manufacturing apparatus according to an embodiment is provided between a process chamber in which exhaust gas is discharged, a drainage unit that discharges a drainage liquid including a part of the exhaust gas, and the process chamber and the drainage unit. The first pipe having a first opening area in a cross section perpendicular to the movement direction of the exhaust gas, and provided between the first pipe and the drainage part, and with respect to the movement direction of the exhaust gas A second pipe having a second opening area smaller than the first opening area in the vertical cross section and a first pipe connected to the first pipe and supplying a condensing agent having a standard boiling point of 25 ° C. or more to the first pipe. A third pipe, and a manufacturing apparatus for a semiconductor device or a liquid crystal device. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7293178-B2 |
| priorityDate |
2017-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |