Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-65 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate |
2018-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f245ddfecb97f7771c44d356e4580e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
publicationDate |
2019-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2019052141-A |
titleOfInvention |
Compound, resist composition and method for producing resist pattern |
abstract |
An object is to provide a compound and a resist composition capable of producing a resist pattern with excellent line edge roughness (LER). A compound represented by formula (I) and a resist composition containing the same. [In Formula (I), R 1 represents a fluorinated hydrocarbon group having 1 to 12 carbon atoms. R 2 represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2- contained in the hydrocarbon group is -O-, -S-, -CO- or It may be replaced by -SO 2- . ] 【Selection chart】 None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020189654-A1 |
priorityDate |
2017-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |