| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G41-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G41-04 |
| filingDate |
2018-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6db13c4a0825389bd6a4f35af82675db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c321a34bac024061cc42a7e02ea1c1c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65028f93059a99b77b06741d3519d3e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0056e8f97dabf5779dba8349b519e431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d7422e268f9bffa99f0f8ee91bfe94f |
| publicationDate |
2019-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019044264-A |
| titleOfInvention |
Method for treating tungsten oxide and method for producing tungsten hexafluoride |
| abstract |
Provided is a method for converting tungsten oxide into a substance having a high vapor pressure selectively with respect to metallic tungsten without a reaction temperature of less than 500 ° C. and without generating oxygen and water by the reaction. Tungsten hexafluoride hardly reacts with metallic tungsten. However, in the method of the present invention, the vapor pressure is reduced by contacting tungsten oxide with tungsten hexafluoride and performing the reaction shown in the reaction formula (7). Converts to high tungstic acid fluoride. WO 3 + 2WF 6 → 3 WOF 4 ... Reaction formula (7) [Selection] Figure 1 |
| priorityDate |
2017-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |