http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019039869-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e66be87630d7cef0ce770e1d898eec |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2017-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45a0918c4c057f69644fc4f6e96b4853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a421849a67424f7da85d762c5e16ea3 |
| publicationDate | 2019-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019039869-A |
| titleOfInvention | High-frequency probe position correction technology |
| abstract | Conventionally, with respect to the alignment of a substrate placed on a sample stage and the X and Y axes of the stage, the θ axis adjustment using a microscope is limited by the resolution of the microscope. Improvement of the accuracy of correction has been desired. The present invention relates to a θ-axis correction based on coordinates obtained by feeding back high-frequency radiation from a high-frequency probe to a positioning pattern on a substrate and measuring the reflected and transmitted waves of S parameters. It was set as the structure which performs. [Selection] Figure 8 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020230326-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019050001-A1 |
| priorityDate | 2017-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2078 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546678 |
Total number of triples: 16.