Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
filingDate |
2018-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_066221b5b0427e8cb3d87d1fabf21e69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94b818ea5096c3acb32e13a82e875d55 |
publicationDate |
2019-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2019033252-A |
titleOfInvention |
Diffusion agent composition and method for manufacturing semiconductor substrate |
abstract |
A diffusing agent composition capable of efficiently (for example, forming a single film) a thin film capable of diffusing impurity diffusion components in a semiconductor substrate at a higher concentration than conventional, and the diffusion. A method for producing a semiconductor substrate using an agent composition is provided. A diffusing agent composition used for impurity diffusion into a semiconductor substrate, comprising an impurity diffusing component (A) and a silane coupling agent (B), wherein the silane coupling agent (B) comprises: A group having a silanol group by hydrolysis and an alkyl group, and at least one of the alkyl groups is a primary amino group, a secondary amino group and a tertiary amino group in the chain and / or at the terminal A diffusing agent composition having at least one amino group selected from the group consisting of: [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020174901-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021192832-A1 |
priorityDate |
2017-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |