http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019019121-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2018-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5756d88bd4de1b02e40fcc310564b566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 |
publicationDate | 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2019019121-A |
titleOfInvention | Salt, acid generator, resist composition, and method for producing resist pattern |
abstract | An object of the present invention is to provide a salt capable of producing a resist pattern with good line edge roughness (LER) and a resist composition containing the salt. A salt represented by formula (I). [In Formula (I), Q 1 and Q 2 each independently represent a fluorine atom or the like. R 1 and R 2 each independently represent a hydrogen atom or the like. z represents an integer of 0 to 6. X 1 represents * —CO—O— or the like. L 1 represents a single bond or the like. Ar represents a C6-C36 divalent aromatic hydrocarbon group which may have a substituent. R 3 represents a hydrocarbon group having 1 to 6 carbon atoms or the like. R 4 represents a hydrogen atom or a hydrocarbon group having 1 to 6 carbon atoms. R 5 represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent. Z + represents an organic cation. ] [Selection figure] None |
priorityDate | 2017-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 240.