http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019019120-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2018-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5756d88bd4de1b02e40fcc310564b566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2019-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019019120-A |
| titleOfInvention | Salt, acid generator, resist composition, and method for producing resist pattern |
| abstract | A salt capable of producing a resist pattern with good line edge roughness (LER) and a resist composition containing the salt are provided. A salt represented by formula (I). [In Formula (I), Q 1 and Q 2 each independently represent a fluorine atom or the like. R 1 and R 2 each independently represent a hydrogen atom or the like. z represents an integer of 0 to 6, and when z is 2 or more, the plurality of R 1 and R 2 may be the same as or different from each other. X 1 represents * —CO—O—, * —O—CO—, * —O—CO—O— or —O—. L 1 represents a divalent hydrocarbon group having 1 to 36 carbon atoms which may have a substituent. R 3 and R 4 each independently represents a hydrogen atom or the like. L 2 represents a single bond or the like. R 5 represents an aromatic hydrocarbon group having 6 to 24 carbon atoms which may have a substituent. Z + represents an organic cation. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018115158-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7044562-B2 |
| priorityDate | 2017-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 250.