http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019006760-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-93 |
| filingDate | 2018-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5a0f29773a00a81cffeccef5e6a21c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d9ab45d90d19234e4e5282fb77563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2019-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2019006760-A |
| titleOfInvention | Salt, acid generator, resist composition, and method for producing resist pattern |
| abstract | A salt capable of producing a resist pattern with good line edge roughness (LER), a resist composition containing the salt, and a method for producing the resist pattern are provided. A salt represented by formula (I). [In Formula (I), Q < 1 > and Q < 2 > represent a fluorine atom or a C1-C6 perfluoroalkyl group mutually independently. R 1 and R 2 each independently represent a hydrogen atom, a fluorine atom, or a C 1-6 perfluoroalkyl group. z represents an integer of 0 to 6, and when z is 2 or more, the plurality of R 1 and R 2 may be the same as or different from each other. X 1 represents * —CO—O— or the like (* represents a bond with C (R 1 ) (R 2 ) or C (Q 1 ) (Q 2 )). L 1 represents a single bond or a divalent hydrocarbon group having 1 to 36 carbon atoms. X 2 represents a methylene group, —O— or the like. Z + represents an organic cation. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7353144-B2 |
| priorityDate | 2017-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 267.