| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026 |
| filingDate |
2017-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7d252274c95f81e7050d2e445a9ebf7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55c52874870e2f7fdf124a8ea6368f54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9a0d75168d3281e9a4eb1c1c3e44d3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_584e3283942376400f6a29ef7ef25493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d0d28c10dd313a2ca06ec2c0c953c56 |
| publicationDate |
2019-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2019003973-A |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| abstract |
A characteristic of a semiconductor optical device such as a semiconductor laser and a characteristic deterioration of a silicon optical waveguide are suppressed so that the two can be optically coupled. An optical mode conversion structure is formed by patterning a regrowth layer (third step). The optical mode conversion structure 106 is formed in a state extending in the waveguide direction of the optical waveguide. Further, the optical mode conversion structure 106 is formed in a state where the width becomes narrower as it is farther from the distal end portion 105a of the active layer 105, and is tapered in the waveguide direction in plan view. [Selection] Figure 1H |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020245935-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020158431-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020245935-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020126878-A |
| priorityDate |
2017-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |