http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018535426-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-0077 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2005-103 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-0003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-10 |
| filingDate | 2016-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018535426-A |
| titleOfInvention | Non-contact thermal measurement of VUV optical elements |
| abstract | Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical element to be measured exhibits low radiation with respect to long-wavelength infrared light, and is often highly reflective or highly transmissive with respect to long-wavelength infrared light. In one aspect, a material coating having high radiation, low reflectivity and low transparency at long IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The location of the material coating is outside the direct optical path of the primary measurement light that is used by the metrology or inspection system to perform specimen measurements. Temperature measurements on the front and back of the IR transmissive optical element are performed by a single IR camera. The temperature measurement is performed by a plurality of optical elements in the optical path of the primary measurement beam. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102316804-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022035154-A1 |
| priorityDate | 2015-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.