http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018533310-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-015 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2437 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-222 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate | 2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018533310-A |
| titleOfInvention | Acoustic resonator device and manufacturing method providing hermeticity and surface functionalization |
| abstract | A microelectromechanical system (MEMS) resonator device includes a top electrode, which is functionalized with a top electrode covered with a low water permeable airtight layer and a functionalized material (eg, a specific binding material). And an interfacial layer comprising a material suitable for receiving a self-assembled monolayer (SAM) (eg, a gold surface or a hydroxide oxide surface), wherein the above-described layers are substantial in sensor performance. Designed to have no effect. Atomic layer deposition may be used for laminating hermetic and / or interfacial layers. The hermetic layer protects the electrode material from attack in a corrosive liquid environment, and the interfacial layer promotes proper chemical bonding of the SAM. Sensors and microfluidic devices incorporating MEMS resonator devices are also provided. |
| priorityDate | 2015-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.