| abstract |
Various cycloolefin / maleic anhydride / maleimide polymers and their compositions useful for forming self-imageable films comprising these polymers are disclosed. Such polymers include norbornene-type repeat units, maleimide repeat units, and maleic anhydride repeat units, wherein at least a portion of the maleic anhydride-type repeat units are ring-opened. Films formed from the polymer composition are self-imageable for use in microelectronic and optoelectronic devices and provide a low-k, thermally stable layer. |