| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D5-0063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-4261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D3-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018512735-A |
| titleOfInvention |
Distillation equipment |
| abstract |
According to the distillation apparatus of the present application, it is possible to minimize the energy loss generated in the purification process of the raw material including the waste stripper used in the photoresist stripping process and the stripped photoresist resin. Since the installation cost of the distillation apparatus can be reduced as compared with the case of purification using a column, the economics of the process can be improved. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020194418-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7290194-B1 |
| priorityDate |
2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |