http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018502449-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018502449-A |
| titleOfInvention | Zirconium-containing film forming composition for depositing zirconium-containing film |
| abstract | The following formula: Zirconium-containing film-forming compositions comprising germanium having one of the following and a zirconium-containing precursor are disclosed, wherein each R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 and R 10 are independently selected from H; C1-C5 straight chain, branched or cyclic alkyl group; and C1-C5 straight chain, branched or cyclic fluoroalkyl group. Also disclosed are methods for synthesizing the compositions of the present disclosure, as well as methods for depositing a zirconium-containing film on a substrate by a vapor deposition process using the compositions of the present disclosure. [Selection] Figure 12 |
| priorityDate | 2014-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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