| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8abb5a7e29fdef50fdbb25ef82bc00d4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-458 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01D18-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06F17-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
| filingDate |
2017-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37ac9db62e29f5094e35348f36712b0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f433eea06091a23e70b63d06fd76cf4 |
| publicationDate |
2018-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018205132-A |
| titleOfInvention |
Optical measuring apparatus and optical measuring method |
| abstract |
An optical measurement apparatus and an optical measurement method are provided that can measure the in-plane distribution of film thicknesses of various samples at higher speed and with higher accuracy. An optical measurement apparatus includes an irradiation optical system that linearly irradiates measurement light having a predetermined wavelength range to a measurement target, and a straight line that is transmitted light or reflected light generated from the measurement target by irradiation of the measurement light. A measurement optical system that receives the measurement interference light in the form of a shape and a processing device. The measurement optical system picks up the measurement interference light in a direction orthogonal to the longitudinal direction of the measurement interference light, and receives the measurement interference light expanded in wavelength by the diffraction grating and outputs a two-dimensional image. Part. The processing device calculates a correction element corresponding to an incident angle from each measurement point to the measurement optical system in association with a region on the two-dimensional image corresponding to each measurement point to be measured irradiated with measurement light. And a second calculation unit that calculates an optical characteristic of the measurement target after applying a corresponding correction element to each pixel value included in the two-dimensional image. [Selection] Figure 12 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7064465-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7141120-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021161986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7199093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11215443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220137615-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020165867-A |
| priorityDate |
2017-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |