http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018200392-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_663cad2cddb9415ae5ba8d9c99803cda |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-064 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2014 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-28 |
| filingDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d6c4ca6f8a1cee642ff730d5951140e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecb4fd6701b937929e26c0cb4a47ba2f |
| publicationDate | 2018-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018200392-A |
| titleOfInvention | Resist layer thinning device |
| abstract | An object of the present invention is to provide a resist layer thinning apparatus capable of solving the problem of uneven processing due to bubbles. In a resist layer thinning apparatus provided with a thinning processing unit, the thinning processing unit includes a dip tank containing a thinning processing liquid and a thinning processing liquid that overflows from the dip tank. , A thinning treatment liquid storage tank 13, a thinning treatment liquid suction port provided in the thinning treatment liquid storage tank 13, a thinning treatment liquid supply port 11 provided in the dip tank 10, A thinning treatment liquid supply pump 14 for supplying the thinning treatment liquid 9 sucked from the thinning treatment liquid suction port to the dip tank 10 is provided, and a filtration unit 24 is provided at the thinning treatment liquid suction port. An apparatus for thinning a resist layer, wherein the upper surface side of the filtration part 24 is shielded. [Selection] Figure 1 |
| priorityDate | 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 105.