http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018179827-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2017-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edbaf99ac0c4a149dd7fe9376b4093de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0b11c5032bc11799d2f5172ba516d84 |
| publicationDate | 2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018179827-A |
| titleOfInvention | Test equipment |
| abstract | The present invention provides a test apparatus capable of bringing a probe into contact with an inspection target while suppressing breakage of the probe and without breaking the impedance matching. A test apparatus (1) includes a probe unit (11) having probes (P1, P2, P3), and a jig (40). The jig (40) includes a fixing unit (41) configured to be able to adjust the position in the Z-axis direction (vertical direction), an operation unit (42) to which the probe unit (11) is fixed, and an operation unit (42). And the coil spring (44) connected to the fixed portion (41) and the operating portion (42). . [Selected figure] Figure 3 |
| priorityDate | 2017-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170 |
Total number of triples: 15.