| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b92609c425eaed9bfd02bb7a3a168c5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-26 |
| filingDate |
2017-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fe8629a59e1a100a446788991eb2698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9dc999dcea11464fd7d428bb665373ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d96f7c7777b204dd18f5bd3886e531d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cbe510fcd3068536c4fe65d0d5fc937
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dbd1bb86f709faa78decfa5e2212feb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f6b0668618bbae231235ebdeda902b7 |
| publicationDate |
2018-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2018166043-A |
| titleOfInvention |
Focused ion beam device |
| abstract |
A focused ion beam device capable of suppressing blunting of the tip of an emitter is provided. The focused ion beam device increases the temperature inside the casing cooled together with the emitter and the emitter by the first heating device every time a predetermined first period elapses, and then uses the cooling device to A first maintenance process for cooling the emitter is performed. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020050324-A1 |
| priorityDate |
2017-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |