http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018165332-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2017-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a62a055ecebd9ef0216959dea213c19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6945033053db86880320855782110e2 |
| publicationDate | 2018-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2018165332-A |
| titleOfInvention | Polishing composition |
| abstract | The problem to be solved by the present invention is to provide a polishing composition for polishing hard and brittle materials, which improves the polishing rate per unit current value and suppresses vibration of the polishing machine. Is. A polishing composition for polishing a hard and brittle material containing a dispersion medium and abrasive grains, wherein the content of abrasive grains having a particle diameter of less than 30 nm is 4.0 of the entire abrasive grains. The content of abrasive grains having a particle diameter of less than 30% and a particle diameter of 30 nm to less than 60 nm, abrasive grains having a particle diameter of 60 nm to less than 100 nm, and abrasive grains having a particle diameter of 100 nm to less than 140 nm are all 2.0% of the total abrasive grains. Polishing composition which is volume% or more. [Selection figure] None |
| priorityDate | 2017-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.